000 00290 a2200121 4500
005 20260305123352.0
020 _a9780123756671
100 _aMilton Ohring
245 _aMaterials Science of Thin Films: Deposition and Structure
250 _a3
260 _bAcademic Press
_c2013
942 _cBK
999 _c5330
_d5330