000 00305 a2200109 4500
005 20250618152102.0
020 _a9781009303583
100 _aJames D. Plummer and Peter B. Griffin
245 _aIntegrated Circuit Fabrication: Science and Technology
260 _bCambridge University Press
_c2023
942 _cBK
999 _c4694
_d4694