000			00647nam a22002057a 4500
003			OSt
005			20221011164251.0
008			221011b |||||||| |||| 00| 0 eng d
020			_a9780195136050
040			_c
082	0	0	_a621.38152 _bCAM / G
100	1		_aCampbell, Stephen A., _eAuthor
245	1	4	_aThe science and engineering of microelectronic fabrication
250			_a2nd ed.
260			_aNew York : _bOxford University Press, _c©2001.
300			_axiv, 603 p. : _bill. ; _c24 cm.
440		4	_aThe Oxford series in electrical and computer engineering
504			_aIncludes bibliographical references and index.
942			_2ddc _cBK
999			_c3696 _d3696