| 000 | 00901cam a2200253 a 4500 | ||
|---|---|---|---|
| 999 |
_c2396 _d2396 |
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| 003 | OSt | ||
| 005 | 20201214134429.0 | ||
| 008 | 080424s2009 flua b 001 0 eng | ||
| 020 | _a9781420043761 | ||
| 040 | _c | ||
| 082 | 0 | 0 |
_a621.381 _bFLE / B |
| 245 | 0 | 0 | _aDefects in microelectronic materials and devices |
| 260 |
_aBoca Raton : _bCRC Press, _c©2009. |
||
| 300 |
_axvi, 753 p. : _bill. ; _c26 cm (Hardbound) |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectronics _xMaterials _xTesting. |
|
| 650 | 0 |
_aMetal oxide semiconductor field-effect transistors _xTesting. |
|
| 650 | 0 |
_aIntegrated circuits _xDefects. |
|
| 700 | 1 |
_aFleetwood, Dan M. _eEditor |
|
| 700 | 1 |
_aPantelides, Sokrates T. _eEditor |
|
| 700 | 1 |
_aSchrimpf, Ronald Donald _eEditor |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/ecip0817/2008018722.html |
| 942 |
_2ddc _cBK |
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