Campbell, Stephen A., <br/><br/>
The science and engineering of microelectronic fabrication 

 - 2nd ed. 
 - New York :  Oxford University Press,  ©2001. 
 - xiv, 603 p. :  ill. ;  24 cm. 
 - The Oxford series in electrical and computer engineering .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780195136050 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM / G