TY  - BOOK
AU  - Fleetwood,Dan M.
AU  - Pantelides,Sokrates T.
AU  - Schrimpf,Ronald Donald
TI  - Defects in microelectronic materials and devices
SN  - 9781420043761
U1  - 621.381 
PY  - 2009///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectronics
KW  - Materials
KW  - Testing
KW  - Metal oxide semiconductor field-effect transistors
KW  - Integrated circuits
KW  - Defects
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip0817/2008018722.html
ER  -