Defects in microelectronic materials and devices - Boca Raton : CRC Press, ©2009. - xvi, 753 p. : ill. ; 26 cm (Hardbound)

Includes bibliographical references and index.

9781420043761


Microelectronics--Materials--Testing.
Metal oxide semiconductor field-effect transistors--Testing.
Integrated circuits--Defects.

621.381 / FLE / B