Defects in microelectronic materials and devices
- Boca Raton : CRC Press, ©2009.
- xvi, 753 p. : ill. ; 26 cm (Hardbound)
Includes bibliographical references and index.
9781420043761
Microelectronics--Materials--Testing.
Metal oxide semiconductor field-effect transistors--Testing.
Integrated circuits--Defects.
621.381 / FLE / B