TY  - BOOK
AU  - Ananthasuresh, G. K.
AU  - Vinoy, K. J.
AU  - Gopalakrishnan, S.
AU  - Bhat, K. N.
AU  - Aatre, V. K.
TI  - Micro and smart devices and systems
SN  - 9788126527151
U1  - 620.5 
PY  - 2010///
CY  - New Delhi
PB  - Wiley India
KW  - Microtechnology
KW  - Nanotechnology
KW  - Smart materials
KW  - Systems engineering
N1  - Includes bibliographical references, glossary and index
ER  -