The science and engineering of microelectronic fabrication
Campbell, Stephen A.,
The science and engineering of microelectronic fabrication - 2nd ed. - New York : Oxford University Press, ©2001. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
9780195136050
621.38152 / CAM / G
The science and engineering of microelectronic fabrication - 2nd ed. - New York : Oxford University Press, ©2001. - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
9780195136050
621.38152 / CAM / G